Solar Cells with Laser Doped Boron Layers from Atmospheric Pressure Chemical Vapor Deposition

We present laser-doped interdigitated back contact (IBC) solar cells with efficiencies of 23% on an area 244 cm2 metallized by a screen-printed silver paste. Local laser doping is especially suited for processing IBC where multitude pn-junctions and base contacts lay side side. The one-sided deposition boron-doped precursor layers atmospheric pressure chemical vapor (APCVD) cost-effective method the production without masking processes. properties silicon strongly depend precursor’s purity, thickness, total amount boron dopants. Variations in terms thickness content, pulse energy density, can help to tailor sheet resistance. With saturation-current densities 70 fA/cm2 at resistances 60 Ohm/sq, we reached maximum relatively simple, industrial process bifacial IBC-cells, 70% bifaciality measured module level. APCVD-layers were deposited inline lab-type system metal transport belt and, therefore, may have been slightly contaminated, limiting when compared thermal-diffused doping. use APCVD quartz glass would achieve even higher efficiencies.